FEI Quanta

High resolution, high precision, and high magnification are an absolute must in today’s failure analysis industry. Sage Analytical Laboratories is capable of taking breathtaking images of samples with our Field Emission Scanning Electron Microscopes (FE-SEM).

With the increased electron beam current supplied by our electron source, we are able to obtain high resolution and accuracy Energy-Dispersive X-ray Spectroscopy (EDS) results.

Combine this with the multiple imaging modes, 5-axis stage control, digital image processing, multiple detectors, and in-situ FIB capabilities; it quickly becomes apparent this is a world-class system. Multiple vacuum settings guarantee charge free imaging of even non-conducting samples.

The specifications from the FEI Quanta website show how versatile a system like this is:

Electron beam resolution

High-vacuum

• • • 0.8 nm at 30 kV (STEM)*
    • 1.2 nm at 30 kV (SE)
    • 2.5 nm at 30 kV (BSE)*
    • 2.9 nm at1 kV (SE)

Low-vacuum

• • • 1.5 nm at 30 kV (SE)
    • 2.5 nm at 30 kV (BSE)
    • 2.9 nm at 3 kV (SE)

Extended low-vacuum mode (ESEM)

• • • 1.5 nm at 30 kV (SE)

Electron optics

• • High-resolution field emission – SEM column optimized for high-brightness/high-current
  • 60 degree objective lens geometry with through-the-lens differential pumping and heated objective apertures* optional
  • Accelerating voltage: 200 V – 30 kV (optional down to 100 V)
  • Probe current: up to 200 nA – continuously adjustable
  • Magnification 30 x – 1280 kx in “quad” mode

Detectors

• • Everhardt-Thornley SED
  • Low-vacuum SED (used in low vacuum)
  • Gaseous SED (GSED) (used in ESEM mode)
  • IR-CCD

Digital image processor

• • Dwell: 50 ns – 25 ms adjustable in steps of 100 ns
  • Up to 4096 x 3536 pixel resolution
  • File type: TIFF (8, 16 or 24 bit), BMP, JPG or AVI
  • Single frame or 4-quadrant image display
  • 4-quadrant live
  • 256 frame average or integration
  • Movie recorder

Chamber

• • 379 mm left to right
  • 21 ports
  • 10 mm E- and I-beam coincidence point = analytical working distance
  • Angle between electron and ion columns: 52°

5-axis motorized stage

• • Eucentric goniometer stage
  • X = 50 mm
  • Y = 50 mm
  • Z = 25 mm
  • Maximum sample height = 50 mm
  • T = -15° to +75°
  • R = n x 360°
  • Minimum step: 300 nm
  • Repeatability at 0° tilt; 2 μm
  • Repeatability at 52° tilt; 4 μm